Display device, semiconductor device, and method of manufacturing display device

ABSTRACT

A display device according to the present disclosure includes: a transistor section (100) that includes a gate insulating film (130), a semiconductor layer (140), and a gate electrode layer (120), the semiconductor layer being laminated on the gate insulating film, the gate electrode film being laminated on an opposite side to the semiconductor layer of the gate insulating film; a first capacitor section (200) that includes a first metal film (210) and a second metal film (220), the first metal film being disposed at a same level as wiring layers (161, 162) that are electrically connected to the semiconductor layer and is disposed over the transistor section, the second metal film being disposed over the first metal film with a first interlayer insulating film (152) in between; and a display element that is configured to be controlled by the transistor section.

CROSS REFERENCES TO RELATED APPLICATIONS

The present application is a continuation of U.S. patent applicationSer. No. 15/794,228, filed on Oct. 26, 2017, which application is acontinuation application of U.S. patent application Ser. No. 15/332,137,filed on Oct. 24, 2016, issued as U.S. Pat. No. 9,935,135 on Apr. 3,2018, which application is a continuation of U.S. patent applicationSer. No. 14/405,859, filed Dec. 5, 2014, issued as U.S. Pat. No.9,508,758 on Nov. 29, 2016, which is a National Stage entry ofPCT/JP2013/063494 filed on May 15, 2013, which claims the priority fromprior Japanese Priority Patent Application JP 2013-046895 filed on Mar.8, 2013, and Japanese Priority Patent Application JP 2012-135458 filedon Jun. 15, 2012, the entire content of which is hereby incorporated byreference.

BACKGROUND ART

In a flat panel display such as a liquid crystal display or an organicEL (Electro-Luminescence) display, an active matrix thin film transistor(TFT) has been widely used for a drive transistor that drives a panel.Each pixel is provided with such a TFT to make it possible to controlbrightness and darkness of each pixel, attaining higher image qualityand higher contrast compared to a passive matrix method.

Moreover, in such a flat panel display, further improvement inperformance is being pursued. For example, there has been proposed atechnique in which a gate insulating film of a TFT and a dielectric filmof a capacitor are fabricated in different layers to allow selection ofan optimum dielectric film without restrictions by TFT materials (Forexample, see Patent Literature 1). Such a dielectric film allows, forexample, selection of a material having a higher dielectric constantthan that of the gate insulating film, or allows smaller thickness forthe same material as the gate insulating film, leading to enhancedcapacity per unit area.

PATENT LITERATURE

PTL 1: JP 2008-102262A

SUMMARY OF INVENTION

The present disclosure relates to a display device, a semiconductordevice, and a method of manufacturing a display device.

However, in Patent Literature 1, a metal film in the same layer as thegate electrode is used for one electrode of the capacitor, causing adisadvantage of preventing improvement in performance of the thin filmtransistor due to restrictions by an arrangement or materials of thecapacitor.

It is therefore desirable to provide a display device, a semiconductordevice, and a method of manufacturing a display device that make itpossible to improve performance.

A display device according to an embodiment of the present technologyincludes: a transistor section that includes a gate insulating film, asemiconductor layer, and a gate electrode layer, the semiconductor layerbeing laminated on the gate insulating film, the gate electrode filmbeing laminated on an opposite side to the semiconductor layer of thegate insulating film; a first capacitor section that includes a firstmetal film and a second metal film, the first metal film being disposedat a same level as a wiring layer that is electrically connected to thesemiconductor layer and is disposed over the transistor section, thesecond metal film being disposed over the first metal film with a firstinterlayer insulating film in between; and a display element that isconfigured to be driven by the transistor section.

A semiconductor device according to an embodiment of the presenttechnology includes a transistor section and a capacitor section, andthe transistor section and the capacitor section have similarconfigurations to those of the transistor section and the firstcapacitor section of the above-described display device.

A method of manufacturing a display device according to an embodiment ofthe present technology includes the following (A) to (C).

(A) forming a transistor section by laminating a gate electrode, a gateinsulating film, and a semiconductor layer

(B) forming a first capacitor section by depositing, over the transistorsection, a wiring layer and a first metal film, and by depositing, overthe first metal film, a second metal film with a first interlayerinsulating film in between, the wiring layer being electricallyconnected to the semiconductor layer, the first metal film being at asame level as the wiring layer

(C) forming a display element that is configured to be controlled by thetransistor section

In the display device, the semiconductor device, and the method ofmanufacturing the display device according to the above-describedembodiments of the present technology, the metal film that constitutesthe capacitor (the first capacitor section) is provided in a differentlayer from the transistor section. This provides a greater degree ofselection of materials of the capacitor.

According to the display device, the semiconductor device, and themethod of manufacturing the display device in the above-describedembodiments, the metal film that constitutes the capacitor (the firstcapacitor section) is provided in a different layer from the transistorsection. This provides a greater degree of selection of materials of thecapacitor, contributing to reduction in resistance of the whole wiring.Hence, it is possible to provide a high-performance display device.

Additional features and advantages are described herein, and will beapparent from the following Detailed Description and the figures.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a diagram illustrating one configuration example of an organicEL display device.

FIG. 2 is a diagram illustrating one example of a circuit configurationof the organic EL display device.

FIG. 3A is a plan view illustrating a configuration of a TFT and acapacitor according to a first embodiment.

FIG. 3B is a cross-sectional view illustrating the configuration of theTFT and the capacitor illustrated in FIG. 3A.

FIG. 4A is a cross-sectional view illustrating a manufacturing processof the TFT and the capacitor illustrated in FIG. 3B.

FIG. 4B is a cross-sectional view illustrating a process following FIG.4A.

FIG. 5A is a cross-sectional view illustrating a process following FIG.4B.

FIG. 5B is a cross-sectional view illustrating a process following FIG.5A.

FIG. 6A is a plan view illustrating a configuration of a TFT and acapacitor according to a second embodiment.

FIG. 6B is a cross-sectional view illustrating the configuration of theTFT and the capacitor illustrated in FIG. 6A.

FIG. 7A is a plan view illustrating a configuration of a TFT and acapacitor according to a third embodiment.

FIG. 7B is a cross-sectional view illustrating the configuration of theTFT and the capacitor illustrated in FIG. 7A.

FIG. 8A is a plan view illustrating another configuration of the TFT andthe capacitor according to the third embodiment.

FIG. 8B is a cross-sectional view illustrating the configuration of theTFT and the capacitor illustrated in FIG. 8A.

FIG. 9A is a plan view illustrating a configuration of a TFT and acapacitor according to a fourth embodiment.

FIG. 9B is a cross-sectional view illustrating the configuration of theTFT and the capacitor illustrated in FIG. 9A.

FIG. 10A is a cross-sectional view illustrating a manufacturing processof the TFT and the capacitor illustrated in FIG. 9B.

FIG. 10B is a cross-sectional view illustrating a process following FIG.10A.

FIG. 11 is a cross-sectional view illustrating a configuration of a TFTand a capacitor according to a fifth embodiment.

FIG. 12 is a cross-sectional view illustrating another configuration ofthe TFT and the capacitor according to the fifth embodiment.

FIG. 13A is a plan view illustrating a configuration of a TFT and acapacitor according to a sixth embodiment.

FIG. 13B is a cross-sectional view illustrating the configuration of theTFT and the capacitor illustrated in FIG. 13A.

FIG. 14A is a cross-sectional view illustrating a manufacturing processof the TFT and the capacitor illustrated in FIG. 13B.

FIG. 14B is a cross-sectional view illustrating a process following FIG.14A.

FIG. 15A is a plan view illustrating a configuration of a TFT and acapacitor according to a modification example 1.

FIG. 15B is a cross-sectional view illustrating the configuration of theTFT and the capacitor illustrated in FIG. 15A.

FIG. 16A is a plan view illustrating a configuration of a TFT and acapacitor according to a seventh embodiment.

FIG. 16B is a cross-sectional view illustrating the configuration of theTFT and the capacitor illustrated in FIG. 16A.

FIG. 17A is a plan view illustrating a configuration of a TFT and acapacitor according to an eighth embodiment.

FIG. 17B is a cross-sectional view illustrating the configuration of theTFT and the capacitor illustrated in FIG. 17A.

FIG. 18A is a plan view illustrating a configuration of a TFT and acapacitor according to a modification example 2.

FIG. 18B is a cross-sectional view illustrating the configuration of theTFT and the capacitor illustrated in FIG. 18A.

FIG. 19A is a cross-sectional view illustrating a manufacturing processof the TFT and the capacitor illustrated in FIG. 18B.

FIG. 19B is a cross-sectional view illustrating a process following FIG.19A.

FIG. 20 is a diagram illustrating an application example of the displaydevice according to the above-described embodiments and so forth.

FIG. 21A is a perspective view illustrating an appearance of anapplication example 1 viewed from the front side.

FIG. 21B is a perspective view illustrating the appearance of theapplication example 1 viewed from the back side.

FIG. 22 is a perspective view illustrating an appearance of anapplication example 2.

FIG. 23A is a perspective view illustrating an appearance of anapplication example 3 viewed from the front side.

FIG. 23B is a perspective view illustrating the appearance of theapplication example 3 viewed from the back side.

FIG. 24 is a perspective view illustrating an appearance of anapplication example 4.

FIG. 25 is a perspective view illustrating an appearance of anapplication example 5.

FIG. 26A is a front view, a left side view, a right side view, a topview, and a bottom view of an application example 6 in a closed state.

FIG. 26B is a front view and a side view of the application example 6 inan opened state.

DETAILED DESCRIPTION

Embodiments of the present application will be described below in detailwith reference to the drawings. It is to be noted that description willbe made in the following order.

1. First Embodiment (an example in which a first capacitor is providedin a different layer from a transistor section)

2. Second Embodiment (an example in which a second capacitor is providedbelow the first capacitor)

3. Third Embodiment (an example in which one metal film of the firstcapacitor is shared with a wiring layer of the transistor section)

4. Fourth Embodiment (an example with use of an interlayer insulatingfilm having a layered structure)

5. Fifth Embodiment (an example with a transistor section of a top gatetype)

6. Sixth Embodiment (a first example in which the first capacitor has arecessed portion)

7. Modification Example 1 (a second example in which the first capacitorhas the recessed portion)

8. Seventh Embodiment (an example in which the second capacitor isprovided below the first capacitor having the recessed portion)

9. Eighth Embodiment (a first example in which the first capacitor has aplurality of recessed portions)

10. Modification Example 2 (a second example in which the firstcapacitor has the plurality of recessed portions)

11. Application Examples

1. First Embodiment

As an example of a flat panel display (a display device), a case of anorganic EL display will be exemplified. FIG. 1 illustrates aconfiguration of the organic EL display.

A display device 10, which is the organic EL display, includes a pixelarray section 12 and a drive section (not illustrated) that drives thepixel array section 12. The pixel array section 12 includes scan lines14 a in rows, signal lines 13 a in columns, pixels 11 in an array thatare disposed at intersections of the scan lines 14 a and the signallines 13 a, power lines 15 a that are disposed in correspondence withthe respective rows of the pixels 11. The drive section includes ahorizontal selector 13, a write scanner 14, and a power scanner 15. Thehorizontal selector 13 is adapted to supply a signal potential as apicture signal and a reference potential to each of the signal lines 13a, to sequentially scan the pixels 11 in units of columns. The writescanner 14 is adapted to sequentially supply a control signal to each ofthe scan lines 14 a in rows in accordance with the scanning by thehorizontal selector 13, to sequentially scan the pixels 11 in units ofrows. The power scanner 15 is adapted to supply a power voltage that isswitched between a first potential and a second potential to each of thepower lines 15 a in accordance with the scanning by the write scanner14.

Next, description will be given, with reference to FIG. 2, on oneexample of a circuit configuration of the pixel 11 of the display device10.

The pixel 11 includes a display element 16 typified by an organic ELdevice and the like, a sampling TFT 17, a driving TFT 100, and acapacitor 200. The sampling TFT 17 has a gate, a source, and a drain.The gate is connected to the associated scan line 14 a. One of thesource and the drain is connected to the associated signal line 13 a,and another is connected to a gate of the driving TFT 100. The drivingTFT 100 has the gate, a source, and a drain. The source is connected toan anode of the display element 16, and the drain is connected to theassociated power line 15 a. A cathode of the display element 16 isconnected to a ground wiring 18. It is to be noted that the groundwiring 18 is wired commonly to all of the pixels 11. The capacitor 200is connected between the source and the gate of the driving TFT 100.

In the pixel 11 as configured above, the sampling TFT 17 is adapted tobecome conductive in response to the control signal supplied from thescan line 14 a, to sample the signal potential supplied from the signalline 13 a, and to retain the signal potential thus sampled in thecapacitor 200.

The driving TFT 100 is adapted to be supplied with a current from thepower line 15 a that is at the first potential, and to allow a drivecurrent to flow through the display element 16 according to the signalpotential retained by the capacitor 200. The power scanner 15 is adaptedto switch the power line 15 a between the first potential and the secondpotential while the horizontal selector 13 is supplying the referencepotential to the signal line 13 a after the sampling TFT 17 becomesconductive, and to allow the capacitor 200 to retain a voltageequivalent to a threshold voltage of the driving TFT 100. With thisthreshold voltage correction function, it is possible to restrain thedisplay device 10 from being affected by variations in the thresholdvoltage of the driving TFTs 100 for each pixel 11.

Next, description will be given, with reference to FIG. 3A and FIG. 3B,on the TFT 100 (a transistor section) and the capacitor 200 (a firstcapacitor section) that constitute the pixel 11.

FIG. 3A illustrates a plan configuration of the TFT 100 and thecapacitor 200 of the pixel 11. FIG. 3B illustrates a cross-sectionalconfiguration along a dot dash line X-X of the pixel 11 in FIG. 3A.

The TFT 100 includes, as illustrated in FIG. 3B, on a glass substrate110, a gate insulating film 130, a semiconductor layer 140, and a gateelectrode film 120. The semiconductor layer 140 is laminated on the gateinsulating film 130. The gate electrode film 120 is laminated on anopposite side to the semiconductor layer 140 of the gate insulating film130. It is to be noted that the first embodiment exemplifies the TFT 100of a bottom gate type, in which the gate electrode film 120, the gateinsulating film 130, and the semiconductor layer 140 are laminated inthis order on the glass substrate 110. The gate insulating film 130 isconfigured of, for example, silicon oxide, silicon nitride, or alamination thereof. The semiconductor layer 140 is configured of, forexample, polysilicon, amorphous silicon, or micro crystal silicon.Moreover, to the semiconductor layer 140, the following organicsemiconductor materials may be applicable: pentacene, naphthacene,hexacene, heptacene, pyrene, chrycene, perylene, coronene, rubrene,polythiophene, polyacene, polyphenylene vinylene, polypyrrole,porphyrin, carbon nanotube, fullerene, metal phthalocyanine, or aderivative thereof. Alternatively, an oxide semiconductor may beapplicable, which is configured of a compound that includes an elementsuch as indium, gallium, zinc, tin, or the like and oxygen. Morespecifically, examples of amorphous oxide semiconductors include indiumgallium zinc oxide, and examples of crystalline oxide semiconductorsinclude zinc oxide, indium zinc oxide, indium gallium oxide, indium tinoxide, indium oxide, or the like.

While the TFT 100 is configured as described above, an interlayerinsulating film 151 (a second interlayer insulating film) is provided onthe semiconductor 140 and the gate insulating film 130. The interlayerinsulating film 151 is provided with contact holes 151 a and 151 b atpredetermined positions. On the interlayer insulating film 151, wiringlayers 161 and 162 are formed. The wiring layers 161 and 162 areelectrically connected to source and drain regions of the semiconductorlayer 140 through the contact holes 151 a and 151 b.

On the interlayer insulating film 151, the wiring layers 161 and 162,and a metal film 210, the capacitor 200 is provided, as well as aninterlayer insulating film 152 (a first interlayer insulating film). Thecapacitor 200 includes a pair of electrodes (metal films) 210 and 220. Adielectric film between the metal films 210 and 220 is configured ofpart of the interlayer insulating film 152. In the present embodiment,one metal film 210 of the capacitor 200 is disposed at a same level withthe wiring layers 161 and 162. The metal film 220 is formed in arecessed portion 152 b that is provided in the interlayer insulatingfilm 152.

The interlayer insulating film 152 is provided with a wiring layer 171and a contact hole 152 a at predetermined positions, as well as therecessed portion 152 b. A wiring layer 172 is formed in the contact hole152 a. It is to be noted that, as illustrated in FIG. 3A, the recessedportion 152 b is formed in an inclusion relationship with the metalfilms 210 and 220.

On the interlayer insulating film 152, an interlayer insulating film 153is further formed, covering the wiring layers 171 and 172, and the metalfilm 220. On the interlayer insulating film 153, a pixel electrode layer180 is formed. The pixel electrode layer 180 is electrically connectedto the wiring layer 171 through a contact hole 153 a.

The wiring layers 161, 162, 171, and 172, and the metal films 210 and220 may be configured of, for example, aluminum, tungsten, copper,titanium, or molybdenum, or an alloy that contains these elements asmain components. The interlayer insulating films 151, 152, and 153 maybe configured of, for example, silicon oxide, silicon nitride,polyimide, or an acrylic resin, or a lamination thereof.

Next, description will be given, with reference to FIG. 3 and FIGS. 4Ato 5B, on a manufacturing method of the TFT 100 and the capacitor 200that constitute the pixel 11. It is to be noted that a case of usingpolysilicon for the semiconductor layer will be described here, but anorganic semiconductor, an oxide semiconductor or the like may besimilarly adoptable.

First, as illustrated in FIG. 4A, the TFT 100 and the interlayerinsulating film 151 are formed. Specifically, on the glass substrate110, a metal thin film is deposited by a sputtering method or the like,and then is patterned to form the gate electrode film 120. Subsequently,on the glass substrate 110 on which the gate electrode film 120 isformed, a film of, for example, silicon oxide, silicon nitride, or alamination thereof is deposited by a CVD (Chemical Vapor Deposition)method to form the gate insulating film 130. Next, on the gateinsulating film 130, for example, an amorphous silicon layer isdeposited by a CVD method, and then is crystallized by ELA (ExcimerLaser Annealing) or the like. On this occasion, a possible alternativeis to directly deposit a polysilicon layer by a CVD method or the like.The amorphous silicon layer thus crystallized is subjected toimplantation of impurities and activation at a predetermined portion,and then is patterned to form the semiconductor layer 140 (a channelregion 140S). Covering the semiconductor layer 140 thus formed, on thegate insulating film 130, for example, silicon oxide is deposited by aCVD method to form the interlayer insulating film 151.

Subsequently, as illustrated in FIG. 4B, the wiring layers 161 and 162,and the metal film 210 are formed. Specifically, a metal film isdeposited on the interlayer insulating film 151. On this occasion, themetal film is also deposited over the contact holes 151 a and 151 b, andthen is patterned to form the wiring layers 161 and 162, and the metalfilm 210. It is to be noted that a film thickness of the metal film 210may be, for example, about 100 to 1500 nm.

Next, as illustrated in FIG. 5A, the interlayer insulating film 152 isformed. Specifically, on the interlayer insulating film 151, forexample, silicon oxide is deposited by a CVD method, covering the wiringlayers 161 and 162, and the metal film 210. The silicon oxide issubjected to lithography and etching at a predetermined portion to formthe interlayer insulating film 152 having the contact hole 152 a thatreaches the wiring layer 162, and the recessed portion 152 b. It is tobe noted that a film thickness d1 between a bottom of the recessedportion 152 b formed in the interlayer insulating film 152 and an uppersurface of the metal film 210 may be arbitrarily set. And a filmthickness h1 of the interlayer insulating film 152 may be, for example,about 150 to 3000 nm.

Subsequently, as illustrated in FIG. 5B, the wiring layers 171 and 172,and the metal film 220 are formed. Specifically, a metal film isdeposited over the contact hole 152 a and the recessed portion 152 b todeposit the metal film on the interlayer insulating film 152. Then, onthe metal film, a resist pattern 153 b is formed. Using the resistpattern 153 b, the metal film is patterned into a predetermined shape toform the wiring layers 171 and 172, and the metal film 220. It is to benoted that a film thickness of the metal film 220 may be, for example,about 100 to 1500 nm. And the wiring layer 171 may be used simply forwiring, and a film thickness d2 between the wiring layers 161 and 171may be desirably set to satisfy a relationship of, for example,d2>(3*d1) for reduction in parasitic capacitance between wirings.

Next, after removing the resist pattern 153 b, for example, siliconoxide is deposited by a CVD method to form the interlayer insulatingfilm 153 on the interlayer insulating film 152, covering the wiringlayers 171 and 172, and the metal film 220. Subsequently, after formingthe contact hole 153 a that reaches the wiring layer 171, a metal filmis deposited on the interlayer insulating film 153 and in the contacthole 153 a, and then is patterned to form the pixel electrode layer 180.Thus, the TFT 100 and the capacitor 200 as illustrated in FIG. 3B arecompleted.

It is to be noted that the following process involves forming, on thepixel electrode layer 180, a light emission layer made of organicmaterials, an electrode layer, a protective layer, and so on in thisorder to form the display element 16 above the TFT 100. Thus, the pixel11 is completed.

As described above, in the pixel 11 of the display device 10 in thepresent embodiment, the metal film 210 as one electrode of the capacitor200 is disposed at a same level as the wiring layers 161 and 162 thatare electrically connected to the semiconductor layer 140 in the TFT100. Over the metal film 210, the metal film 220 as another electrode ofthe capacitor 200 is disposed with the interlayer insulating film 152 inbetween. The metal films 210 and 220 allow independent and easyfabrication without restrictions due to the gate electrode film 120 andthe pixel electrode layer 180, contributing to reduction in resistanceof the whole wiring of the pixel 11. Accordingly, in the pixel 11 of thedisplay device 10, wiring delay is prevented, which facilitates anincrease in the number of the pixels 11 and allows high speed drive ofthe pixel 11, improving performance.

In the method of manufacturing the display device according to thepresent embodiment, it is possible for the interlayer insulating film152 between the pair of metal films 210 and 220 of the capacitor 200 tobe separately formed with a variation in film quality, the filmthickness d1, or a lamination structure between a portion thatconstitutes the capacitor 200 and a portion other than the portion thatconstitutes the capacitor 200. Hence, it is possible to maintain desiredcharacteristics as the capacitor 200 and to reduce parasitic capacitancebetween wirings. Accordingly, in the pixel 11 of the display device 10,occurrence of noises and so on is restrained, which leads to higherimage quality of the pixel 11, improving performance.

In the following, description will be given on second to eightembodiments and modification examples 1 and 2. It is to be noted thatsame components as the first embodiment are denoted by same referencenumerals, and description thereof will be omitted.

2. Second Embodiment

In the second embodiment, description will be given, with reference toFIG. 6A and FIG. 6B, on a case that a capacitor 200 a, which constitutesa pixel 11 a of the display device 10, is provided above anothercapacitor (a capacitor 300, a second capacitor).

FIG. 6A illustrates a plan configuration of the TFT 100 and thecapacitors 200 a and 300 of the pixel 11. FIG. 6B illustrates across-sectional configuration along a dot dash line X-X of the pixel 11in FIG. 6A.

In the pixel 11 a, as illustrated in FIGS. 6A and 6B, the capacitor 200a is formed at a position above the capacitor 300 that is disposed onthe left side of the TFT 100 in the figure. Otherwise, the configurationis similar to that of the pixel 11 according to the first embodiment.

Moreover, in the pixel 11 a, for example, as described with reference toFIG. 4A, on the glass substrate 110, a metal thin film is deposited by asputtering method or the like, and then is patterned to form anelectrode film 320 as well as the gate electrode film 120. The electrodefilm 320 is to serve as one electrode of the capacitor 300. On the glasssubstrate 110 on which the gate electrode films 120 and 320 are formed,the gate insulating film 130 is formed. On the gate insulating film 130,for example, an amorphous silicon layer is deposited. The amorphoussilicon layer is crystallized into a polysilicon layer. The polysiliconlayer is subjected to implantation of impurities and activation at apredetermined portion, and then is patterned to newly form asemiconductor layer 340 as well as the semiconductor layer 140. Thesemiconductor layer 340 is to serve as another electrode of thecapacitor 300.

In the subsequent processes, similar manufacturing processes to those ofthe first embodiment are carried out to form the pixel 11 a of thedisplay device 10.

As described above, also in the pixel 11 a of the display device 10according to the present embodiment, the metal film 210 as one electrodeof the capacitor 200 a is disposed at a same level as the wiring layers161 and 162 that are electrically connected to the semiconductor layer140 in the TFT 100. Over the metal film 210, the metal film 220 asanother electrode of the capacitor 200 a is disposed with the interlayerinsulating film 152 in between. The metal films 210 and 220 allowindependent and easy fabrication without restrictions due to the gateelectrode film 120, the electrode film 320, and the pixel electrodelayer 180, contributing to reduction in resistance of the whole wiringof the pixel 11 a. Accordingly, in the pixel 11 of the display device10, wiring delay is prevented, which facilitates an increase in thenumber of the pixels 11 a and allows high speed drive of the pixel 11 a,improving performance.

Moreover, in the method of manufacturing the display device according tothe present embodiment, similarly to the above-described firstembodiment, it is possible for the interlayer insulating film 152 to beseparately formed with a variation in film quality, the film thicknessd1, or a lamination structure between a portion that constitutes thecapacitor 200 a and a portion other than the portion that constitutesthe capacitor 200 a. Hence, it is possible to maintain desiredcharacteristics as the capacitor 200 a and to reduce parasiticcapacitance between wirings. Accordingly, in the pixel 11 of the displaydevice 10, occurrence of noises and so on is restrained, which leads tohigher image quality of the pixel 11 a, improving performance.

Furthermore, since the capacitor 200 a and the capacitor 300 of thepixel 11 a have electrodes in different layers from each other, it ispossible to dispose the capacitor 200 a and the capacitor 300 in anoverlapped relationship in plan view. Accordingly, in the pixel 11 a ofthe display device 10, storage capacity per unit area is enhanced,making it possible to improve image quality in attaining highly finenessof the pixels 11 a. In other words, it is possible to provide thedisplay device 10 having high performance.

3. Third Embodiment

In the third embodiment, description will be given, with reference toFIG. 7A and FIG. 7B, on a case that the metal film 210 of the capacitor200 and the wiring layer 162 are integrally formed as a continuouscommon layer.

FIG. 7A illustrates a plan configuration of the TFT 100 and a capacitor200 b of a pixel 11 b. FIG. 7B illustrates a cross-sectionalconfiguration along a dot dash line X-X of the pixel 11 b in FIG. 7B.

In the pixel 11 b, as illustrated in FIGS. 7A and 7B, on the interlayerinsulating film 151, a wiring layer 163, which is electrically connectedto the semiconductor layer 140, is formed extending to the left side inthe figure. Furthermore, in a recessed portion 152 c that is formed inthe interlayer insulating film 152, a metal film 173 is formed facingthe wiring layer 163. In the present embodiment, the wiring layer 163and the metal film 173 serve as a pair of electrodes of the capacitor200 b. Otherwise, the configuration is similar to that of the pixel 11 baccording to the first embodiment.

Moreover, in the pixel 11 b, for example, as described with reference toFIG. 4B, a metal film is deposited on the interlayer insulating film 151in which the contact holes 151 a and 151 b are formed, and then ispatterned to form the wiring layer 163 as well as the wiring layer 161.Also, as described with reference to FIG. 5A, the interlayer insulatingfilm 152 is formed on the interlayer insulating film 151, covering thewiring layers 161 and 163. The recessed portion 152 c is formed, facingthe wiring layer 163, by etching at a predetermined position of theinterlayer insulating film 152.

In the subsequent processes, similar manufacturing processes to those ofthe first embodiment are carried out to form the pixel 11 b of thedisplay device 10.

In the pixel 11 b of the display device 10 according to the presentembodiment, the wiring layer 163, which is electrically connected to thesemiconductor layer 140 of the TFT 100, is disposed extending to anopposite side to the wiring layer 161 (to the left side in FIG. 7).Furthermore, the metal film 173 is provided on the wiring layer 163 withthe interlayer insulating film 152 in between, and one electrode of thecapacitor 200 b is configured as a common layer to the wiring layer 163of the TFT 100. The wiring layer 163 and the metal film 173 allowindependent and easy fabrication without restrictions due to the gateelectrode film 120 and the pixel electrode layer 180, contributing toreduction in resistance of the whole wiring of the pixel 11 b.Accordingly, in the pixel 11 b of the display device 10, wiring delay isprevented, which facilitates an increase in the number of the pixels 11b and allows high speed drive of the pixel 11 b, improving performance.

Moreover, in the method of manufacturing the display device according tothe present embodiment, similarly to the above-described firstembodiment, it is possible for the interlayer insulating film 152 to beseparately formed with a variation in film quality, the film thicknessd1, or a lamination structure between a portion that constitutes thecapacitor 200 b and a portion other than the portion that constitutesthe capacitor 200 b. Hence, it is possible to maintain desiredcharacteristics as the capacitor 200 b and to reduce parasiticcapacitance between wirings. Accordingly, in the pixel 11 b of thedisplay device 10, occurrence of noises and so on is restrained, whichleads to higher image quality and improved performance.

Moreover, it is possible to allow the capacitor 200 b to have largerarea, in plan view, than, for example, that of the capacitor 200according to the first embodiment. This makes it possible to increase atotal sum of storage capacity per unit area.

It is to be noted that, in the pixel 11 b, it is possible to allow thewiring layer 163 to extend further to the wiring layer 161 side. Detailsof this case will be explained with reference to FIG. 8.

FIG. 8A illustrates a plan configuration of the TFT 100 and a capacitor200 c of a pixel 11 c. FIG. 8B illustrates a cross-sectionalconfiguration along a dot dash line X-X of the pixel 11 c in FIG. 8A.

In the pixel 11 c, as illustrated in FIG. 8A, a wiring layer 164 isdisposed extending to the wiring layer 161 side (to the right side inthe figure), too. The wiring layer 164 substantially overlaps thechannel region 140S of the TFT 100 in plan view. Furthermore, a metalfilm 174 is disposed facing the wiring layer 164.

Also in this case, it is possible to obtain similar effects to those ofthe above described pixel 11 b. Since the wiring layer 164 and the metalfilm 174 overlap the channel region 140S of the TFT 100, it is possibleto allow the wiring layer 164 and the metal film 174 to have a functionof a shielding film for the TFT 100, restraining occurrence of anoptical leak current.

It is to be noted that, in the pixel 11 b or 11 c according to the thirdembodiment, it is possible to dispose, below the capacitor 200 b or 200c, the capacitor 300 as described in the second embodiment. In thiscase, it is possible to increase storage capacity per unit area, furtherenhancing performance of the pixels 11 b and 11 c in attaining higherdefinition of the display device 10.

4. Fourth Embodiment

In the fourth embodiment, description will be given, with reference toFIG. 9A and FIG. 9B, on a case that the interlayer insulating film 152has a layered structure (a two-layered structure, as exemplified; aninterlayer insulating film 152A and a high dielectric interlayer film152B), and the high dielectric interlayer film 152B is formed betweenthe metal films 210 and 220.

FIG. 9A illustrates a plan configuration of the TFT 100 and a capacitor200 d of a pixel 11 d. FIG. 9B illustrates a cross-sectionalconfiguration along a dot dash line X-X of the pixel 11 d in FIG. 9A.

In the pixel 11 d of the display device 10 according to the presentembodiment, as mentioned above, the interlayer insulating film 152 has alayered structure, that is, a configuration in which the high dielectricinterlayer film 1526 and the interlayer insulating film 152A are stackedin this order from the interlayer insulating film 151 side. In thepresent embodiment, the high dielectric interlayer film 1526 is disposedbetween the metal film 210 and the metal film 220, which constitute thecapacitor 200 d.

As a constituent material of the high dielectric interlayer film 152B, amaterial having a high dielectric constant may be preferably used.Examples of such materials may include, as well as silicon nitride, amaterial having a relative dielectric constant of 10 or more,specifically, hafnium oxide, hafnium silicate, aluminum oxide, tantalum(V) oxide, titanium oxide, lanthanum oxide, zirconium oxide, and so on.These materials are used for the high dielectric interlayer film 1526 ina form of a single layer film or a laminated film. Among theabove-mentioned materials, in particular, silicon nitride, hafniumoxide, aluminum oxide and tantalum (V) oxide may be preferably used.Moreover, here, as exemplified, the high dielectric interlayer film 152Bis formed as a continuous film on the interlayer insulating film 151 andthe wiring layer 161, but this is not limitative. Instead, the highdielectric interlayer film 152B may be selectively provided at aposition facing the capacitor 200 d. Alternatively, without forming thehigh dielectric interlayer film 1526 separately, a layer that isprovided in a region other than the pixel 11 d may be extended for use.The layer that is provided in a region other than the pixel 11 d may be,for example a layer that is provided in a peripheral region other than adisplay region (both not illustrated) where the pixels 11 d areprovided. Moreover, the interlayer insulating film 152A may beconfigured of a similar material to that of the interlayer insulatingfilm 152 according to the above-described embodiment. Moreover, exceptfor the interlayer insulating film 152, the configuration is similar tothat of the pixel 11 according to the first embodiment.

Next, description will be given, with reference to FIGS. 10A and 10B, ona method of manufacturing the TFT 100 and the capacitor 200 d thatconstitute the pixel 11 d.

First, similarly to the first embodiment, on the glass substrate 110,the TFT 100 and the interlayer insulating film 151 are formed. Afterthis, the wiring layers 161 and 162, and the metal film 210 are formed.

Subsequently, as illustrated in FIG. 10A, the high dielectric interlayerfilm 152B is formed. Specifically, for example, hafnium silicate film isdeposited by a CVD method or a sputtering method on the interlayerinsulating film 151, covering the wiring layers 161 and 162, and themetal film 210. Then, on the film, a resist pattern 252 is formed. Usingthe resist pattern 252, the film is patterned into a predetermined shapeto form an opening. Thus, the high dielectric interlayer film 152Bhaving a contact hole 191 is formed.

Next, as illustrated in FIG. 10B, the interlayer insulating film 152A isformed. Specifically, first, the resist pattern 252 is removed. Afterthis, for example, silicon oxide is deposited by a CVD method on thehigh dielectric interlayer film 152B. Subsequently, the contact hole 152a and the recessed portion 152 b are formed by lithography and etchingat predetermined positions of the silicon oxide film. The contact hole152 a reaches the wiring layer 162. The recessed portion 152 b reachesthe high dielectric interlayer film 152B. Thus, the interlayerinsulating film 152 is formed. It is to be noted that, also in thefourth embodiment, the wiring layer 171 may be desirably used simply forwiring, and, for example, the film thickness d2 in FIG. 10B may bedesirably set to satisfy a relationship of d2>(3*d1) for reduction inparasitic capacitance. Specifically, d1 may be 50 to 500 nm, and d2 maybe 150 to 3000 nm. Moreover, regarding a positional relationship of thecontact holes 191 and 152 a, they may be disposed to have an overlap inplan view. Regarding sizes of the contact holes 191 and 152 a, one ofthem may be formed within confines of another. Moreover, regarding theorder of forming the contact holes 191 and 152 a, either of them may beformed earlier.

In the subsequent processes, similar manufacturing processes to theprocess of FIG. 5B and the succeeding processes of the first embodimentare carried out to form the pixel 11 d of the display device 10.

As described above, also in the pixel 11 d of the display device 10according to the present embodiment, the metal film 210 as one electrodeof the capacitor 200 d is disposed at a same level as the wiring layers161 and 162 that are electrically connected to the semiconductor layer140 of the TFT 100. Over the metal film 210, the metal film 220 asanother electrode of the capacitor 200 d is disposed with the interlayerinsulating film 152 in between. The metal films 210 and 220 allowindependent and easy fabrication without restrictions due to the gateelectrode film 120 and the pixel electrode layer 180, contributing toreduction in resistance of the whole wiring of the pixel 11 d.Accordingly, in the pixel 11 d of the display device 10, wiring delay isprevented, which facilitates an increase in the number of the pixels 11d and allows high speed drive of the pixel 11 d, improving performance.

In the method of manufacturing the display device according to thepresent embodiment, similarly to the above-described first embodiment,it is possible for the interlayer insulating film 152 to be separatelyformed with a variation in film quality, the film thickness d1, or alamination structure between a portion that constitutes the capacitor200 d and a portion other than the portion that constitutes thecapacitor 200 d. Hence, it is possible to maintain desiredcharacteristics as the capacitor 200 d and to reduce parasiticcapacitance between wirings. Accordingly, in the pixel 11 d of thedisplay device 10, occurrence of noises and so on is restrained, whichleads to higher speed drive and higher image quality of the pixel 11 d,improving performance.

Furthermore, in the present embodiment, the interlayer insulating film152 has a layered structure, and one layer (the high dielectricinterlayer film 1526) of the layered structure is configured of amaterial having a high dielectric constant, and is formed on the wiringlayers 161 and 162, and the metal film 210. In this way, surfaces of thewiring layers 161 and 162, and the metal film 210 are protected in acase that a repair process is carried out during a period from theformation of the wiring layers 161 and 162, and the metal film 210 tothe formation of the wiring layers 171 and 172, and the metal film 220.Hence, it is possible to prevent damage to the wiring layers 161 and162, and the metal film 210, restraining degradation of the pixels 11 dand so on.

It is to be noted that the high dielectric interlayer film 1526 of thepixel 11 d according to the fourth embodiment may be similarly appliedto the pixels 11, 11 a, 11 b, and 11 c according to the first to thirdembodiments.

5. Fifth Embodiment

In the fifth embodiment, description will be given, with reference toFIG. 11, on a case that a TFT of a top gate type is used as the TFT 100that constitutes a pixel 11 e.

FIG. 11 illustrates a cross-sectional configuration of the TFT 100 and acapacitor 200 e according to the fifth embodiment. It is to be notedthat a plan configuration of the pixel 11 e illustrated in FIG. 11 maybe represented similarly to FIG. 3A.

As the pixel 11 e, FIG. 11 illustrates a TFT 100 of a top gate type, inwhich, on the glass substrate 110, an undercoat insulating film (notillustrated), a semiconductor layer 440, a gate insulating film 430, anda gate electrode film 420 are laminated in this order.

It is to be noted that, regarding the semiconductor layer 440, the gateinsulating film 430, and the gate electrode film 420, same materials asthe semiconductor layer 140, the gate insulating film 130, and the gateelectrode film 120 as explained in the first embodiment may beapplicable, respectively. Moreover, except for the undercoat insulatingfilm, the semiconductor layer 440, the gate insulating film 430, and thegate electrode film 420, the configuration is similar to that of thepixel 11 e as described in the first embodiment.

In the pixel 11 e, first, on the glass substrate 110, by a plasma CVDmethod, silicon oxide, silicon nitride, or the like is deposited to formthe undercoat insulating film as a structure that prevents impuritydiffusion. Moreover, on the undercoat insulating film, for example, anamorphous silicon layer is deposited by a CVD method. The amorphoussilicon layer is crystallized by ELA or the like. On this occasion, apossible alternative is to directly deposit a polysilicon layer by a CVDmethod or the like. The polysilicon layer thus crystallized is subjectedto implantation of impurities and activation at a predetermined portion,and then is patterned to form the semiconductor layer 440 (a channelregion 440S). On the glass substrate 110 on which the semiconductorlayer 440 is formed, a film of, for example, silicon oxide, siliconnitride, or a lamination thereof is deposited by a CVD method to formthe gate insulating film 430. On the gate insulating film 430, a metalthin film is deposited by a sputtering method or the like, and then ispatterned to form the gate electrode film 420.

In the subsequent processes, similar manufacturing processes to thefirst embodiment as described with reference to FIG. 4B to FIG. 5B arecarried out to form the pixel 11 e of the display device 10.

Moreover, in the pixel 11 e, as illustrated in FIG. 12, similarly to thesecond embodiment, a capacitor 200 f may be formed above anothercapacitor.

FIG. 12 illustrates another cross-sectional configuration (a pixel 11 f)of the TFT 100 and the capacitor 200 f according to the fifthembodiment. It is to be noted that a plan configuration of the pixel 11f illustrated in FIG. 12 may be represented similarly to FIG. 6A.

In the pixel 11 f, as illustrated in FIG. 12, the capacitor 200 f isformed at a position above a capacitor 500 that is disposed on the leftside of the TFT 100 in the figure. Otherwise, the configuration issimilar to that of the pixel 11 according to the first embodiment.

In the pixel 11 f, first, on an undercoat insulating film 430 a on theglass substrate 110, for example, an amorphous silicon layer isdeposited by a CVD method. The amorphous silicon layer is crystallizedby ELA or the like. On this occasion, a possible alternative is todirectly deposit a polysilicon layer by a CVD method or the like.

The polysilicon layer thus crystallized is subjected to implantation ofimpurities and activation at a predetermined portion, and then ispatterned to form a semiconductor layer 540 as well as the semiconductorlayer 440 (the channel region 440S). On the glass substrate 110 on whichthe semiconductor layers 440 and 540 are formed, a film of siliconoxide, silicon nitride, or a lamination thereof is deposited by a CVDmethod to form the gate insulating film 430. And on the gate insulatingfilm 430, a metal thin film is deposited by a sputtering method or thelike, and then is patterned to form a gate electrode film 520 as well asthe gate electrode film 420.

In the subsequent processes, similar manufacturing processes to thefirst embodiment as described with reference to FIG. 4B to FIG. 5 arecarried out to form the pixel 11 f of the display device 10.

As described above, in the pixel 11 e or 11 f of the display device 10,the metal film 210 is disposed at a same level as the wiring layers 161and 162 that are electrically connected to the semiconductor layer 440.The wiring layers 161 and 162 are disposed above the TFT 100 thatincludes the gate insulating film 430, the semiconductor layer 440laminated on the undercoat insulating film 430 a, and the gate electrodefilm 420 that is laminated on an opposite side to the semiconductorlayer 440 of the gate insulating film 430. Furthermore, the metal film220 is disposed over the metal film 210 with the interlayer insulatingfilm 152 in between, forming the capacitor 200 e or 200 f including themetal films 210 and 220. The metal films 210 and 220 allow independentand easy fabrication without restrictions due to the gate electrode film420 and the pixel electrode layer 180, contributing to reduction inresistance of the whole wiring of the pixel 11 e or 11 f. Accordingly,in the pixel 11 e or 11 f of the display device 10, wiring delay isprevented, which facilitates an increase in the number of the pixel 11 eor 11 f and allows high speed drive of the pixel 11 e or 11 f, improvingperformance.

Moreover, in the capacitor 200 e or 200 f that includes the metal films210 and 220, it is possible for the interlayer insulating film 152,which is disposed between the metal films 210 and 220, to be separatelyformed with a variation in film quality, the film thickness, or alamination structure, regarding a region other than the capacitor 200 eor 200 f. Hence, it is possible to maintain desired characteristics asthe capacitor 200 e or 200 f and to reduce parasitic capacitance betweenwirings. Accordingly, in the pixel 11 e or 11 f of the display device10, occurrence of noises and so on is restrained, which leads to higherimage quality of the pixel 11 e or 11 f, improving performance.

Furthermore, in the case of the pixel 11 f, the electrodes of thecapacitor 200 f are formed in different layers from those of thecapacitor 500, allowing the capacitor 200 f and the capacitor 500 to bedisposed in an overlapped relationship in plan view. Accordingly, in thepixel 11 f of the display device 10, storage capacity per unit area isincreased, improving performance of the pixel 11 f.

It is to be noted that the pixels 11 e and 11 f according to the fifthembodiment allows application of the wiring layers 163 and 164, and thehigh dielectric interlayer film 152B according to the third and thefourth embodiments, leading to a further increase in a total sum ofstorage capacity. Moreover, in a case that the high dielectricinterlayer film 152B is formed, it is possible to prevent damage to thewiring layers 161 and 162, and the metal film 210, restrainingdegradation of the pixels 11 e and 11 f and so on.

6. Sixth Embodiment

FIG. 13A illustrates a plan configuration of the TFT 100 and a capacitor200 g of a pixel 11 g that constitutes the display device 10 accordingto the sixth embodiment. FIG. 13B illustrates a cross-sectionalconfiguration along a dot dash line X-X of the pixel 11 g illustrated inFIG. 13A. In the pixel 11 g, similarly to the fourth embodiment, theinterlayer insulating film 152 (a first interlayer insulating film) hasa layered structure, and the high dielectric interlayer film 152B isprovided between the metal film 210 and the metal film 220 thatconstitute the capacitor 200 g. However, the present embodiment isdifferent from the fourth embodiment in that a recessed portion 200A isformed in an in-plane direction of the capacitor 200 g (a firstcapacitor).

The capacitor 200 g is formed along a contact hole 151 c (a throughhole) that penetrates the interlayer insulating film 151 (the secondinsulating film). Thus, the recessed portion 200A is formed in contactwith the gate insulating film 130 of the TFT 100. It is to be notedthat, in FIG. 13A, the capacitor 200 g and the contact hole 151 c are ina fully overlapped state, but they may not be in a full inclusionrelationship.

The pixel 11 g may be manufactured as follows. First, as illustrated inFIG. 4A, similarly to the fourth embodiment, on the glass substrate 110,the gate electrode film 120, the gate insulating film 130, and thesemiconductor layer 140 are formed in this order. After this, theinterlayer insulating film 151 is formed. Subsequently, as illustratedin FIG. 14A, for example, using a fluorine-based gas, the contact holes151 a, 151 b, and 151 c are formed at predetermined positions of theinterlayer insulating film 151. Next, as illustrated in FIG. 14B, thewiring layers 161 and 162, the metal film 210, and the high dielectricinterlayer film 152B are formed. In the subsequent processes, similarmanufacturing processes to the above-described first and the fourthembodiments are carried out to complete the pixel 11 g.

As described above, in the pixel 11 g of the display device 10, thecapacitor 200 g having the recessed portion 200A in the in-planedirection is formed. The recessed portion 200A is configured of thecontact hole 151 c, which is formed in the same process as the processof forming the contact holes 151 a and 151 b for the wiring layers 161and 162 that are electrically connected to the driving TFT 100. Thus, itis possible to form, not only in a planar direction but alsothree-dimensionally in a film thickness direction of the interlayerinsulating film 151, a structure (a capacitor structure) in which themetal films 210 and 220 are disposed facing each other with the highdielectric interlayer film 152B in between.

As described above, in the pixel 11 g of the display device 10 accordingto the present embodiment, the contact hole 151 c is provided at apredetermined position of the interlayer insulating film 151, formingthe capacitor 200 g having the recessed portion 200A. In this way, it ispossible to provide the capacitor structure not only in the in-planedirection but also in a vertical direction (the film thicknessdirection) of the interlayer insulating film 151. Hence, it is possibleto obtain, in addition to effects of the fourth embodiment, an effect ofimproving capacity per unit area. In other words, it is possible toprovide a display device having higher definition and higher imagequality.

It is to be noted that, in the present embodiment, the whole bottom ofthe recessed portion 200A is in contact with the gate insulating film130, but this is not limitative. For example, the semiconductor layer140 may be extended to the capacitor 200 g, forming a structure in whichthe recessed portion 200A is in a straddling relationship with the gateinsulating film 130 and the semiconductor layer 140.

7. Modification Example 1

FIG. 15A illustrates a plan configuration of the TFT 10 and a capacitor200 h that constitute a pixel 11 h of the display device 10 according toone modification example of the sixth embodiment. FIG. 15B illustrates across-sectional configuration along a dot dash line X-X of the pixel 11h illustrated in FIG. 15A. The pixel 11 h is different from the sixthembodiment in that the contact hole 151 c, which forms the recessedportion 200A of the capacitor 200 h, penetrates the gate insulating film130 in addition to the interlayer insulating film 151.

As mentioned above, the recessed portion 200A of the capacitor 200 haccording to the present modification example is formed by the contacthole 151 c that penetrates the interlayer insulating film 151 and thegate insulating film 130. The bottom of the recessed portion 200A is incontact with the glass substrate 110. The contact hole 151 c is formed,similarly to the sixth embodiment, in the same process as the process offorming the contact holes 151 a and 151 b, by using, for example, afluorine-based liquid chemical or a fluorine-based gas.

As described above, in the pixel 11 h of the display device 10 accordingto the present modification example, the contact hole 151 c, which formsthe recessed portion 200A of the capacitor 200 h, penetrates theinterlayer insulating film 151 and the gate insulating film 130. Thus, alevel difference due to the recessed portion 200A becomes larger by thefilm thickness of the gate insulating film 130, making it possible tofurther increase capacity per unit area of the capacitor 200 h.

8. Seventh Embodiment

FIG. 16A illustrates a plan configuration of the TFT 100 and a capacitor200 i of a pixel 11 i that constitutes the display device 10 accordingto the seventh embodiment of the present technology. FIG. 16Billustrates a cross-sectional configuration along a dot dash line X-X ofthe pixel 11 i illustrated in FIG. 16A. The pixel 11 i is different fromthe sixth embodiment in that the recessed portion 200A is provided in anin-plane direction of the capacitor 200 i (a first capacitor), andanother capacitor 300 (a second capacitor) is disposed below therecessed portion 200A.

Below the capacitor 200 i, similarly to the second embodiment, thecapacitor 300 is disposed. The capacitor 300 is formed in the same layeras the TFT 100. In other words, the capacitor 200 i and the capacitor300 are disposed entirely or partly in an overlapped relationship on aplan view.

The capacitor 300 has a similar configuration to the second embodiment.The electrode film 320 and the semiconductor layer 340 constitute a pairof electrodes of the capacitor 300. In the present embodiment, thesemiconductor layer 340 is electrically connected to the electrode film210, which constitutes the capacitor 200 i, through the contact hole 151c.

The TFT 100 and the capacitor 200 i according to the present embodimentmay be formed by carrying out similar processes to those of the sixthembodiment. It is to be noted that, in a process of forming the contactholes 151 a, 151 b, and 151 c in the interlayer insulating film 151,since the semiconductor layer 340 is provided below the contact hole 151c, etching with use of, for example, a fluorine-based liquid chemical ora fluorine-based gas may be preferable.

As described above, in the pixel 11 i, on the glass substrate 110, thecapacitor 300 having a similar layered structure to the TFT 100 isformed. Above the capacitor 300, the capacitor 200 i, which has therecessed portion 200A, is provided. In other words, the capacitor 300and the capacitor 200 i are disposed to have an overlap. Thus, inaddition to effects of the above-described embodiments and themodification example, it is possible to further increase capacity perunit area.

Moreover, in the present embodiment, the metal film 210 of the capacitor200 i and the semiconductor layer 340 of the capacitor 300 areelectrically connected through the contact hole 151 c. This leads toreduction in area for connecting the capacitor 200 i and the capacitor300, making it possible to provide a display device having higherdefinition.

9. Eighth Embodiment

FIG. 17A illustrates a plan configuration of the TFT 100 and a capacitor200 j of the pixel 11 j that constitutes the display device 10 accordingto the eighth embodiment of the present technology. FIG. 17B illustratesa cross-sectional configuration along a dot dash line X-X of the pixel11 j illustrated in FIG. 17A. The pixel 11 j is different from the sixthembodiment in that two recessed portions 200A and 200B are provided inan in plane direction of the capacitor 200 j.

In the present embodiment, there are formed a plurality of (two, asexemplified) contact holes (contact holes 151 c and 151 d) thatpenetrate the interlayer insulating film 151 at predetermined positions.Thus, the capacitor 200 j is provided with the two recessed portions200A and 200B, as mentioned above. It is to be noted that, in FIG. 17A,the capacitor 200 j and the contact holes 151 c and 151 d are in a fullyoverlapped state, but they may not be in a full inclusion relationship.

The plurality of recessed portions (the recessed portions 200A and 200B)as in the present embodiment, i.e., the contact holes (the contact holes151 c and 151 d) may be formed using similar processes to those of thesixth embodiment, by forming a resist pattern at predeterminedpositions.

As described above, in the pixel 11 j according to the presentembodiment, the plurality of contact holes 151 c and 151 d are formed atpredetermined positions of the interlayer insulating film 151, allowingthe capacitor 200 j to have the plurality of recessed portions 200A and200B in the in-plane direction. Thus, it is possible to form morecapacitor structures in the film thickness direction of the interlayerinsulating film 151. Hence, in addition to effects of theabove-described embodiments and the modification example, it is possibleto obtain an effect of further increasing capacity per unit area.

It is to be noted that, as illustrated in FIG. 17B, the bottoms of therecessed portions 200A and 200B of the capacitor 200 j according to thepresent embodiment are in contact with the gate insulating film 130, butthis is not limitative. For example, similarly to the modificationexample 1, the contact holes 151 c and 151 d, which constitute therecessed portions 200A and 200B, may penetrate the gate insulating film130 in addition to the interlayer insulating film 151, and the bottomsof the recessed portions 200A and 200B may be in contact with the glasssubstrate 110. Thus, it is possible to further increase capacity perunit area of the capacitor 200 j.

10. Modification Example 2

FIG. 18A illustrates a plan configuration of a pixel 11 k that includesa capacitor 200 k, which is one modification example of the eighthembodiment. FIG. 18B illustrates a cross-sectional configuration along adot dash line X-X of the pixel 11 k illustrated in FIG. 18A. The presentmodification example is different from the above-described eighthembodiment in that the capacitor 200 k includes a plurality of (two, asexemplified) recessed portions (the recessed portions 200A and 200B),and in the interlayer insulating film 151, a film thickness of anadjacent portion 151A between the adjacent recessed portions 200A and200B is smaller than that of a portion other than the adjacent portion151A.

The capacitor 200 k according to the present modification exampleincludes the two recessed portions 200A and 200B as mentioned above. Afilm thickness of the interlayer insulating film 151 that separates therecessed portions 200A and 200B, specifically, a thickness of theadjacent portion 151A is smaller than (for example, about a half of)that of a non-adjacent portion 151B. Thus, it is possible to reduce anaspect ratio of the adjacent portion 151A of the interlayer insulatingfilm 151.

The pixel 11 k may be manufactured as follows. First, as illustrated inFIG. 4A, similarly to the first embodiment, on the glass substrate 110,the gate electrode film 120, the gate insulating film 130, and thesemiconductor layer 140 are formed in this order. After this, theinterlayer insulating film 151 is formed. Subsequently, as illustratedin FIG. 19A, the contact holes 151 a′, 151 b′, and 151 c′ are formed byusing, for example, a fluorine-based gas at predetermined positions ofthe interlayer insulating film 151, allowing the film thickness of theinterlayer insulating film 151 to become a half of the original filmthickness. Next, as illustrated in FIG. 19B, after forming a resistpattern in the contact hole 151 c′, etching is carried out again to formthe contact holes 151 a, 151 b, 151 c, and 151 d. In subsequentprocesses, similar manufacturing processes as those of the sixthembodiment are carried out to form the pixel 11 k.

It is to be noted that the contact holes 151 a, 151 b, 151 c, and 151 dare formed by two-stage etching. However, for example, they may beformed in one process by, for example, half exposure. Specifically, informing resist patterns at positions corresponding to the contact holes151 a, 151 b, 151 c, and 151 d, the resist patterns on the adjacentportion 151A between the contact holes 151 c and 151 d is formed with asmaller film thickness. Thus, it is possible to control the filmthickness of the adjacent portion 151A of the interlayer insulating film151.

As described above, in the pixel 11 k according to the presentmodification example, in the interlayer insulating film 151, theadjacent portion 151A between the recessed portions 200A and 200B of thecapacitor 200 k is allowed to have a smaller film thickness. Thus, theaspect ratio of the adjacent portion 151A of the interlayer insulatingfilm 151 is reduced, enhancing coverage property in forming the metalfilm 210, the high dielectric interlayer film 1528, and the metal film220, which are formed on the interlayer insulating film 151.Accordingly, it is possible to reduce a risk of occurrence of voids,which leads to increased capacity of the capacitor 200 k and reducesdifficulty in manufacturing processes.

11. Application Examples Module and Application Examples

In the following, description will be given on application examples ofthe display device 10 as described in the above-mentioned first toeighth embodiments and the modification examples 1 and 2. FIGS. 20 to26B illustrate the application examples of the display device. Thedisplay device 10 according to the above-mentioned embodiments may beapplied to a television set, a digital camera, a notebook personalcomputer, a mobile terminal device such as a mobile phone, or a videocamera, or the like, i.e. an electronic apparatus in various fields thatis configured to display an image or a picture based on a picture signalinput from outside or a picture signal generated inside.

Module

The display device 10 according to the above-described embodiments andso forth is incorporated, for example, in a form of a module 600 asillustrated in FIG. 20, in various electronic apparatuses such asapplication examples 1 to 5, which are exemplified in the following. Themodule 600 includes, for example, along one side of the glass substrate110 as illustrated in FIG. 3, a region 630 that is exposed from aprotective layer 610 and a sealing substrate 620, which are laminated inthis order on the pixel electrode layer 180. In the exposed region 630,provided are external connection terminals (not illustrated) that areextended from wirings of the horizontal selector 13 and the writescanner 14 that are provided in the pixel array section 12. On theexternal connection terminals, flexible printed circuits (FPC) 640 and650 may be provided for signal input and output.

Modification Example 1

FIG. 21 illustrates an appearance of a smart phone. The smart phoneincludes, for example, a display section 1210 (the display device 1) anda non-display section (a casing) 1220, and an operation section 1230.The operation section 1230 may be provided either on a front face of thenon-display section 1220 as illustrated in (A) or on a top face asillustrated in (B).

Modification Example 2

FIG. 22 illustrates an appearance configuration of a television set. Thetelevision set 700 includes, for example, a picture display screensection 710 (the display device 1) that includes a front panel 720 and afilter glass 730.

Modification Example 3

FIGS. 23A and 23B illustrate an appearance configuration of a digitalstill camera 800, from the front and from the rear, respectively. Thedigital still camera includes, for example, a lighting section for flashlighting 810, a display section 820 (the display device 1), a menuswitch 830, and a shutter button 840.

Modification Example 4

FIG. 24 illustrates an appearance configuration of a notebook personalcomputer 900. The personal computer 900 includes, for example, a mainbody 910, a keyboard 920 for input operations of characters and thelike, and a display section 930 (the display device 1) for imagedisplay.

Modification Example 5

FIG. 25 illustrates an appearance configuration of a video camera 1000.The video camera 1000 includes, for example, a main body 1010, a lens1020 for photographing an object, which is provided on a front side faceof the main body 1010, a start/stop switch 1030 in photographing, and adisplay section 1040 (the display device 1).

Modification Example 6

FIGS. 26A and 26B illustrate an appearance configuration of a mobilephone 1100. FIG. 26A illustrates a front view, a left side view, a rightside view, a top view, and a bottom view of the mobile phone in a closedstate. FIG. 26B illustrates a front view and a side view of the mobilephone in an opened state. The mobile phone has a configuration, forexample, in which an upper casing 1110 and a lower casing 1120 arelinked by a connection section (a hinge section) 1120, and includes adisplay 1140 (the display device 1), a sub-display 1150, a picture light1160, and a camera 1170.

Although the present technology has been described by giving the firstto eighth embodiments and the modification examples 1 and 2, the presenttechnology is not limited to the above-mentioned example embodiments andso forth, and may be modified in a variety of ways.

For example, a material and a thickness of each layer, depositionmethods and deposition conditions as described in the above-mentionedexample embodiments and so forth are not limited to as exemplifiedabove, but other materials or other thicknesses, or other depositionmethods or other deposition conditions may be adopted.

Moreover, in the above-described example embodiments and so forth,description has been given on specific configurations of the pixels 11,11 a to 11 k. However, it is not necessary to include all the layersdescribed above, and rather a layer or layers other than theabove-mentioned layers may be also included.

It is to be noted that the present technology may have the followingconfigurations.

(1) A display device including: a transistor section that includes agate insulating film, a semiconductor layer, and a gate electrode layer,the semiconductor layer being laminated on the gate insulating film, thegate electrode film being laminated on an opposite side to thesemiconductor layer of the gate insulating film; a first capacitorsection that includes a first metal film and a second metal film, thefirst metal film being disposed at a same level as a wiring layer thatis electrically connected to the semiconductor layer and is disposedover the transistor section, the second metal film being disposed overthe first metal film with a first interlayer insulating film in between;and a display element that is configured to be controlled by thetransistor section.

(2) The display device according to (1), further including a secondcapacitor section that is provided below the first capacitor section,wherein the second capacitor section includes an insulating film, aseparate semiconductor film, and a metal film, the insulating film beingdisposed at a same level as the gate insulating film, the separatesemiconductor film being disposed at a same level as the semiconductorlayer, the metal film being disposed at a same level as the gateelectrode layer.

(3) The display device according to (1) or (2), wherein the wiring layerand the first metal film are integrally formed, the wiring layer beingelectrically connected to the semiconductor layer.

(4) The display device according to any one of (1) to (3), wherein thefirst capacitor section includes at least one recessed portion in aplane of the first capacitor section.

(5) The display device according to (4), wherein a bottom of therecessed portion is in contact with the gate insulating film of thetransistor section.

(6) The display device according to (4), wherein a bottom of therecessed portion is in contact with a substrate on which the transistorsection is provided.

(7) The display device according to any one of (4) to (6), wherein therecessed portion is formed over the second capacitor section, and thefirst metal film of the first capacitor is electrically connected to oneelectrode film of the second capacitor section.

(8) The display device according to any one of (4) to (7), furtherincluding a second interlayer insulating film that is provided over thetransistor section and includes at least one through hole, wherein thefirst capacitor section is provided over the second interlayerinsulating film, and the recessed portion is formed in the through hole.

(9) The display device according to any one of (4) to (8), wherein thesecond interlayer insulating film includes two or more through holes asthe through hole, and the second interlayer insulating film differs inthickness between an adjacent portion to another through hole and anon-adjacent portion.

(10) The display device according to any one of (1) to (9), wherein thefirst interlayer insulating film is formed over the wiring layer.

(11) The display device according to any one of (1) to (10), wherein thefirst interlayer insulating film is configured of any one, or any two ormore of silicon oxide, silicon nitride, polyimide, and an acrylic resin.

(12) The display device according to any one of (1) to (11), wherein thefirst interlayer insulating film has a layered structure including atleast one layer that is configured of a high dielectric constantmaterial.

(13) The display device according to (12), wherein the high dielectricconstant material is a material having a relative dielectric constant of10 or more.

(14) A semiconductor device including: a transistor section thatincludes a gate insulating film, a semiconductor layer, and a gateelectrode layer, the semiconductor layer being laminated on the gateinsulating film, the gate electrode film being laminated on an oppositeside to the semiconductor layer of the gate insulating film; and a firstcapacitor section that includes a first metal film and a second metalfilm, the first metal film being disposed at a same level as a wiringlayer that is electrically connected to the semiconductor layer and isdisposed over the transistor section, the second metal film beingdisposed over the first metal film with a first interlayer insulatingfilm in between.

(15) The semiconductor device according to (14), further including asecond capacitor section that is provided below the first capacitorsection, wherein the second capacitor section includes an insulatingfilm, a separate semiconductor film, and a metal film, the insulatingfilm being disposed at a same level as the gate insulating film, theseparate semiconductor film being disposed at a same level as thesemiconductor layer, the metal film being disposed at a same level asthe gate electrode layer.

(16) The semiconductor device according to (14) or (15), wherein thewiring layer and the first metal film are integrally formed, the wiringlayer being electrically connected to the semiconductor layer.

(17) The semiconductor device according to any one of (14) to (16),wherein the first interlayer insulating film is formed over the wiringlayer.

(18) The semiconductor device according to any one of (14) to (17),wherein the first interlayer insulating film is configured of any one,or any two or more of silicon oxide, silicon nitride, polyimide, and anacrylic resin.

(19) A method of manufacturing a display device, including: forming atransistor section by laminating a gate electrode, a gate insulatingfilm, and a semiconductor layer; forming a first capacitor section bydepositing, over the transistor section, a wiring layer and a firstmetal film, and by depositing, over the first metal film, a second metalfilm with a first interlayer insulating film in between, the wiringlayer being electrically connected to the semiconductor layer, the firstmetal film being at a same level as the wiring layer; and forming adisplay element that is configured to be controlled by the transistorsection.

(20) The method of manufacturing the display device according to (19),further including: depositing a second interlayer insulating film afterforming the transistor section; and forming a through hole in the secondinterlayer insulating film.

It should be understood that various changes and modifications to thepresently preferred embodiments described herein will be apparent tothose skilled in the art. Such changes and modifications can be madewithout departing from the spirit and scope of the present subjectmatter and without diminishing its intended advantages. It is thereforeintended that such changes and modifications be covered by the appendedclaims.

The invention claimed is:
 1. A display device comprising, in this order:a substrate; a semiconductor film; a first insulating film; a firstmetal film; a second insulating film; a second metal film; a thirdinsulating film; and a third metal film; wherein a pixel circuit regionincludes: a first section corresponding to an overlap portion of a firstportion of the semiconductor film, a first portion of the firstinsulating film and a first portion of the first metal film; a secondsection corresponding to an overlap portion of a first portion of thesecond metal film, a first portion of the third insulating film and afirst portion of the third metal film; a third section corresponding toa second portion of the semiconductor film, and the second portion ofthe semiconductor film overlapping with the second section in a crosssectional view; a fourth section including a first wiring, wherein thefirst wiring includes a second portion of the second metal film, and thefirst wiring is electrically connected to the first section; and a fifthsection including a second wiring, wherein the second wiring includes asecond portion of the third metal film, wherein the first section is atransistor, wherein the second section is a capacitor, wherein a firstvertical distance from a top surface of the first portion of the secondmetal film to a bottom surface of the first portion of the third metalfilm is smaller than a second vertical distance from a top surface ofthe first portion of the second metal film to a bottom surface of thesecond portion of the third metal film overlapping with the thirdinsulating film in the cross sectional view, wherein the thirdinsulating film has a layered structure including a high dielectricconstant material, and wherein the transistor is configured to control alight emitting element.
 2. The display device according to claim 1,wherein the first portion of the semiconductor film and the secondportion of the semiconductor film are separately formed.
 3. The displaydevice according to claim 1, wherein the first portion of the thirdmetal film and the second portion of the third metal film are separatelyformed.
 4. The display device according to claim 1, wherein the thirdinsulating film includes at least one recessed portion in across-sectional view.
 5. The display device according to claim 1,wherein the pixel circuit region further includes the second wiringoverlapping with the first portion of the first metal film in the planview.
 6. The display device according to claim 1, wherein a fourthinsulating film is disposed on the third metal film and a fourthelectrode film is disposed on the fourth insulating film.
 7. The displaydevice according to claim 6, wherein the light emitting element includesthe fourth electrode film and an organic light emission layer, andwherein a second portion of the third metal film is connected to thefourth electrode film.
 8. The display device according to claim 6,wherein the fourth electrode film includes a pixel electrode.
 9. Thedisplay device according to claim 1, wherein a size of the first portionof the third metal film is larger than a size of the first portion ofthe second metal film in the plan view.
 10. The display device accordingto claim 1, wherein the first insulating film includes at least oneselected from the group consisting of silicon oxide, silicon nitride,polyimide, and an acrylic resin.
 11. The display device according toclaim 1, wherein a thickness of the first portion of the thirdinsulating film is from 50 nm to 500 nm.
 12. The display deviceaccording to claim 1, wherein a thickness of the first portion of thesecond metal film is from 100 nm to 1500 nm, and wherein a thickness ofthe first portion of the third metal film is from 100 nm to 1500 nm. 13.The display device according to claim 1, wherein the transistor is adriving transistor.
 14. The display device according to claim 1, whereinthe first wiring is electrically connected to the transistor via a firstcontact hole provided in the second insulating film.
 15. The displaydevice according to claim 1, wherein the first metal film and the secondmetal film include a same material.
 16. The display device according toclaim 1, wherein the semiconductor layer includes an oxidesemiconductor.
 17. A display device comprising, in this order: asubstrate; a semiconductor film; a first insulating film; a first metalfilm; a second insulating film; a second metal film; a third insulatingfilm; a fourth insulating film; and a third metal film, wherein a pixelcircuit region includes: a first section corresponding to an overlapportion of a first portion of the semiconductor film, a first portion ofthe first insulating film and a first portion of the first metal film; asecond section corresponding to an overlap portion of a first portion ofthe second metal film, a first portion of the third insulating film anda first portion of the third metal film; a third section correspondingto a second portion of the semiconductor film; and a fourth sectioncorresponding to an overlap portion of a second portion of the secondmetal film, a second portion of the third insulating film and a firstportion of the fourth insulating film, wherein the second portion of thesecond metal film is a first wiring and the first wiring is electricallyconnected to the first section, a fifth section including a secondwiring, wherein the second wiring includes a second portion of the thirdmetal film, wherein the first section is a transistor, wherein thesecond section is a first capacitor, wherein a first vertical distancefrom a top surface of the first portion of the second metal film to abottom surface of the first portion of the third metal film is smallerthan a second vertical distance from a top surface of the first portionof the second metal film to a bottom surface of the second portion ofthe third metal film overlapping with the fourth section, wherein thetransistor is configured to control a light emitting element, whereinthe first portion of the third metal film is directly in contact withthe first portion of the third insulating film in the second section,and wherein the third insulating film includes an inorganic material andthe fourth insulating film includes an organic material.
 18. The displaydevice according to claim 17, wherein the first portion of thesemiconductor film and the second portion of the semiconductor film areseparately formed.
 19. The display device according to claim 17, whereinthe first portion of the third metal film and the second portion of thethird metal film are separately formed.
 20. The display device accordingto claim 17, wherein the fourth insulating film includes at least onerecessed portion in a cross-sectional view.
 21. The display deviceaccording to claim 17, wherein the second wiring overlaps with the firstportion of the first metal film in the plan view.
 22. The display deviceaccording to claim 17, wherein a fifth insulating film is disposed onthe third metal film and a fourth electrode film is disposed on thefifth insulating film.
 23. The display device according to claim 22,wherein the light emitting element includes the fourth electrode filmand an organic light emission layer, and wherein a second portion of thethird metal film is connected to the fourth electrode film.
 24. Thedisplay device according to claim 22, wherein the fourth electrode filmincludes a pixel electrode.
 25. The display device according to claim17, wherein a size of the first portion of the third metal film islarger than a size of the first portion of the second metal film in theplan view.
 26. The display device according to claim 17, wherein thefirst insulating film includes at least one selected from the groupconsisting of silicon oxide, silicon nitride, polyimide, and an acrylicresin.
 27. The display device according to claim 17, wherein a thicknessof the first portion of the third insulating film is from 50 nm to 500nm.
 28. The display device according to claim 17, wherein a thickness ofthe first portion of the second metal film is from 100 nm to 1500 nm,and wherein a thickness of the first portion of the third metal film isfrom 100 nm to 1500 nm.
 29. The display device according to claim 17,wherein the transistor is a driving transistor.
 30. The display deviceaccording to claim 17, wherein the first wiring is electricallyconnected to the transistor via a first contact hole provided in thesecond insulating film.
 31. The display device according to claim 17,wherein the first metal film and the second metal film include a samematerial.
 32. The display device according to claim 17, wherein thesemiconductor layer includes an oxide semiconductor.